Pressure Sensor
Generic platform with customized options
Leverage the mature process modules to shorten the time to market
Wide pressure range to fulfill variety of aspects of requirements
Uniform performance and output across a whole wafer
Samples available for quick evaluation
KOH etched cavity / Typical PS with glass pedestal / Smaller absolute PS with embedded cavity / Back-entry Absolute PS
APM Pressure Sensor Standard Sample List
Thermopile
Layout design comes from customer.
Fixed process (film stacking and thickness) but adjustable poly sheet resistance.
1P2M and 2P2M with backside release
Large suspended diaphragm, over 1.0 mm2
Better efficiency with an additional black absorber layer
Cumulative Shipments: Over 14,000 wafers
Thermal Isolation Devices
Suitable for thermal isolation devices (Flow, Gas, Temperature, etc.)
Layout design comes from customer.
Fixed process (film stacking and thickness) but adjustable Pt thickness (≤ 2000A)
Reliable adhesion layer for Pt to base film & passivation
Proper film composition with stress balance
Suspended diaphragm for high-temperature operation (heater > 650°C)
Integration of Pt heater & RTD or thermopile temperature sensor
Small sensing area, less than 1.0 mm2
High precision VG with 45° or 54.7° slope
Potential to integrate with thin-film resistor, metal trace, and solder
54.7° V-groove 45° V-groove
U-groove Optional metal layers
For further information, please feel free to contact us via the following email address. sales@apmsinc.com
